High flow valves

MKS Instruments Inc. has introduced High flow valves (HFV), featuring a high conductance design that meets high flow requirements. HFV valves are suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications. Edge-welded bellows prevent out-gassing and virtual leaks, and maximize stroke length to maintain high conductance. To accommodate any footprint requirement, the HFV valve can be mounted vertically or horizontally without effect to its isolating seal performance. HFV valves also can be completely disassembled in the field. HFV valves feature a 304 stainless steel vacuum grade, fusion welded, beaded blasted body that resists corrosion and has fewer entrapment areas for high purity. They can be heated to 185C to prevent process by-products from condensing in the valve. To accommodate different process temperatures and composition requirements, a variety of elastomer seals are available, including Viton®, Chemraz®, Kalrez®, and Perlast®. HFV valves are available in sizes NW160, NW200, NW250, and NW320.

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