Swagelok has launched its thermal-immersion diaphragm valves. Designed for high-temperature processes the valves feature high-speed actuation and are fully immersible at temperatures up to 220C. With flow coefficients up to 0.60, the valves are suitable for rapid thermal processing, precursor delivery applications, and deposition processes, including atomic layer deposition. A fully contained high-purity grade PFA seat offers compatibility with a wide range of chemistries, including advanced liquid and solid source materials such as zirconium and hafnium. The seat design also provides resistance to swelling and contamination during processing. With a fully swept flow path, the valves minimize entrapment areas, facilitate purging, and maximize flow capacity. The valve body is manufactured from 316L VIM-VAR stainless steel and available with a variety of 1/4in and 3/8in end connections, including VCR and “H” Type VCR metal gasket face seal fittings, tube butt weld, and modular surface mount. The valves are offered in both pneumatically actuated and manual models. Pneumatically-actuated models are capable of a valve opening or closing time of less than 5ms. Manual models feature a lock-out handle.