Entegris Inc., released performance data at SEMICON® Taiwan on its recently launched Integra® Plus WS high-flow, fluid management valves. These valves, introduced in July 2017, are designed for use with corrosive chemicals in semiconductor manufacturing applications. The data, collected from extensive testing completed by Entegris in June, 2017 indicates up to a 70% increase in flow performance over competitive valves for applications involving ultrapure bulk chemicals and CMP slurry applications.
The new Integra Plus WS valves utilize a streamlined fluid flow path for improved flow performance. Flow-rate testing on the new valves has yielded superior results, when compared to alternative valve solutions.
The new valves offer an innovative, single-piece and adhesive-free diaphragm design that directly couples the diaphragm to the valve actuator to eliminate potential diaphragm separation in vacuum applications and increase valve life. They are constructed from high-purity, chemically resistant PFA and PTFE to maintain chemical purity and feature a small footprint to reduce required space within equipment.
Integra Plus WS valves are available with PrimeLock®, Flaretek® and PureBond® pipe port connections.
