SEMI-GAS Systems, a provider of ultra-high purity gas sources and distribution systems, now offers a simplified line of semi-automatic valve manifold boxes that facilitate pressure-regulated gas delivery to multiple points-of-use. With fewer components to potentially fail, Nanoturion Single Emergency Shut Off (ESO) Semi-Automatic Valve Manifold Boxes (VMBs) minimize production downtime, system maintenance and equipment costs. The VMBs are ideal for use in critical semiconductor, LED and research and development applications.
SEMI-GAS semi-automatic VMBs are available in 4, 6, and 8 stick models, each featuring a simplified rail-mounted stick design for easy maintenance and expansion to accommodate fab additions, process changes and new tool installations. Individual process sticks are pressure regulated and the lines are isolated for localized gas control.
Each unit includes a GigaGuard Emergency Shutdown System (ESS) Controller that continuously monitors system conditions and automatically interrupts gas flow in the event of an alarm. Emergency shutdown can also be operator-activated via an abort button or via a remote shutdown input. LED lights display constant system status, and accompany an audible alarm to signal hazardous conditions.
The standard 4-stick model is compact at 37” tall, 22” wide and 12” deep and includes a UL-approved fire sprinkler as well as integrated wall or rack mount attachment points. The enclosure is constructed of welded 11 Ga steel, with a 1/4″ thick safety glass window and a self-closing, self-latching door.
