ULVAC Inc. has developed and commercialized large pendulum valves “VFR-400” and “VFR-500” for FPD manufacturing equipment such as organic EL (electroluminescent) manufacturing equipments and large vacuum equipments which are on sale as of this September 2011. Vacuum chambers and vacuum pumps are isolated by vacuum valves in vacuum systems.
“Angle valves” and “gate valves” are commonly used as vacuum valves. Pendulum valves that have features of compactness and low vibration have now started being used as main valves in vacuum systems. Previously 6- to 14in pendulum valves have been mainstream, but as large pendulum valves are now being used in organic EL, LCD and other FPD processes, the demand for them is increasing.
“Angle valves” and “gate valves” are commonly used as vacuum valves. Pendulum valves that have features of compactness and low vibration have now started being used as main valves in vacuum systems. Previously 6- to 14in pendulum valves have been mainstream, but as large pendulum valves are now being used in organic EL, LCD and other FPD processes, the demand for them is increasing.
Based on this situation, ULVAC developed and commercialized the Large Pendulum Valves VFR-400 and VFR-500 for these large vacuum equipments. Diameter of the newly developed Large Pendulum Valve “VFR-400” and “VFR-500” is 16in and 20in. This product does not use a mechanical lock mechanism, but instead employs unique sealing mechanism realized low-vibration opening and closing movement (patent pending).
Maintainability was improved because it is possible to put on and take off its valve plate without removing its valve casing from vacuum systems.
