SEMI-GAS® features its High Flow 8-Line Fully Automatic Valve Manifold Box (VMB) within its Nanoturion™ Valve Manifold Boxes line for safe distribution of hazardous process gases. As a large volume alternative to the smaller, standard VMB models, the High Flow 8-Line VMB features 8 fully populated 1/2” gas sticks on the manifold to support flowrate capacities up to 600 slpm.
This high flow VMB is equipped with a UL-labelled, GigaGuard™ GSM controller featuring a 4.3” colour touchscreen and stick status indicator lights for intuitive operation. Like all SEMI-GAS® products, the VMB is built in accordance with SEMI-S2 standards and is helium leak tested to 1.0 x 10-9 Atm-cc/sec, making it a production-ready solution for rigorous semiconductor and high-tech manufacturing environments.
High Flow 8-Line Fully Automated VMB also features A safety enclosure with a differential pressure switch exhaust monitor and sprinkler system, a fully automated distribution manifold with 3/4″ process gas inlet header and ½” high flow gas sticks, a rail mounted gas stick design for ease of maintenance and flexibility for expansion, fully automatic system operation, local and remote emergency system shutdown, with upgradeable communications capabilities, reinforced rear mounting holes for wall or rack installations.