The Veriflo division of Parker Hannifin has introduced a miniature point-of-use pressure regulator designed to reduce semiconductor tool real estate and costs. Despite a compact footprint of 1.25in square the new MiniQ offers a Cv of 0.1 and an ability to accommodate inlet pressures to 35Barg. MiniQ is a threadless style, non-tied, double-diaphragm regulator for pressure control of high purity gases. Designed using the same dimensions as the Veriflo Quantum valves and SQMicro regulators, it allows semiconductor tool OEMs to mount gas stick components more closely, to reduce system footprints. Fabricated from 316L stainless steel, with Hastelloy C-22 diaphragms and an Inconel poppet, the MiniQ is available with either tube stub or face seal connections. The valve features a PCTFE seat with a poppet design that is self-centering, for repeatable positive closure. The MiniQ operates over a -40 to +66C temperature range.
