Swagelok, a provider of fluid system products, assemblies, and related services, has announced the release of the Swagelok® ALD7 ultrahigh-purity (UHP) diaphragm valve—a product capable of delivering the consistency and long service life necessary for semiconductor fabricators to improve chip yields. Compared to Swagelok’s current top-of-the-line ALD6 valve, the ALD7 provides better flow consistency, flow capacity, and actuator speed. It also offers the performance at high temperatures necessary to allow chip fabricators to overcome limitations in current production processes and keep up with demand.
ALD7 valves can be integrated into either new tools or legacy equipment to provide improved flow capacity (up to 0.7 Cv) in the same 1.5-inch (38.1mm) footprint as existing valves, helping fabricators keep up with the strong global demand for chips that power advanced technology. ALD7 valves deliver precise dosing over tens of millions of ALD (atomic layer deposition) production cycles by actuating more quickly and consistently than even its ALD6 predecessor. The actuator’s open and close response time can be less than 5ms. The actuator is immersible to 150°C (302°F) and the valve body is rated to 200°C (392°F), allowing the valve to better support low-vapor-pressure precursors that require high-temperature delivery. This gives fabricators the control needed to maximize throughput and yield.
ALD7 valves feature a compact design with an integrated thermal isolator, allowing system designers to maximize limited space near the reaction chamber of chip production tools. The valves are also highly resistant to corrosive gases used in ALD processes, with valve bodies comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel. As a result, semiconductor tool manufacturers can rely on ALD7 valves to provide consistent performance under variable process conditions, enhancing productivity for customers without increasing operating costs.